The complexity of modern materials and devices demands highly sophisticated characterisation techniques that enable high spatial resolution information to be gleaned in two and three dimensions. Electron tomography is a high spatial resolution technique that allows quantitative information to be reconstructed using a series of 2-dimensional images. A number of different imaging modes can be used: STEM tomography can reveal 3D morphological changes, EFTEM and EELS tomography 3D composition, holographic tomography electro-magnetic potentials and diffraction contrast tomography can reveal the distribution of dislocations in a 3D network.

Electron tomography can be undertaken either in the TEM or dual-beam FIB SEM - for dual beam research click here .